CKD
Series FSM3 flow sensor
Flow sensor in a compact design
For use in the semiconductor, biochemical, food, pharmaceutical and process industries
Series FSM3 flow sensor
The series FSM3 flow sensor from CKD is specially designed for measuring the flow of gas in the semiconductor, biochemical, food, pharmaceutical and process industries. Featuring a plastic and stainless steel housing, it covers a flow range from 15 ml/min to 1000 l/min. The sensor is capable of measuring and adjusting the flow of five different gases and gas mixtures. The MEMS sensor technology minimises pressure loss while ensuring high precision and fast response times.
