Miniature flow switch
For use in the semiconductor, biochemical, food, pharmaceutical and process industries
The series FSM-X miniature flow switches from CKD enable precise gas flow measurement in the semiconductor, biochemical, food, pharmaceutical and process industries. With a plastic housing and a flow range of 50 ml/min to 10 l/min for air and N2 gas, they minimise pressure loss by relying on MEMS sensor technology and are characterised by their high accuracy and fast response times.